Chapter 271: Building a Photolithography Factory

In the president's office of the Ames company building in Eindhoven, Kajedi was leaning back in his chair and looking at the computer screen.

It was afternoon tea time, and every time he would take time to relax and read the latest international news with the tea prepared by his secretary. Especially after China announced that it would develop its own extreme ultraviolet lithography machine, he paid more attention to the news there.

"We have successfully achieved direct quantum communication and set a new world record...but I don't see any practical value in it." Kajedi smiled and shook his head.

Following my gaze towards the screen, I saw the latest report from Reuters on the homepage.

Whether it is quantum computing or quantum communication, he does not think it has much value before practical application.

I even felt a little disdainful of the content of this news.

Even if China has made new progress in the field of quantum communications, it still cannot develop extreme ultraviolet lithography machines and cannot escape the difficulties it faces.

Just as he raised the cup to his mouth, a name in the news suddenly caught his attention.

"Xu Yuan!"

"The genius recognized by the world?"

He was stunned for a moment, then a smug smile appeared on his face: "This genius from China is not as amazing as the media reports. I said that not everyone can develop an extreme ultraviolet lithography machine."

After finishing it, I feel much better.

Xu Yuan is a celebrity in the world. He proved the Hodge conjecture in his twenties, won the Grand Slam of world mathematics awards, became a true master of mathematics, and made contributions in the field of aerospace. In just a dozen years, his life can be called a legend, and he has a pivotal position in the academic world.

Gained countless fans.

As the president and CEO of Ames, he really did not believe that China could develop an extreme ultraviolet lithography machine.

Even with drawings.

So when facing the interview with reporters, he gave his evaluation without hesitation.

But when he later learned that Xu Yuan would also participate in the research and development of extreme ultraviolet lithography machines, it would be a lie for him to say that he had no worries at all.

Although Xu Yuan's area of ​​expertise is not optoelectronics.

no way.

It was because Xu Yuan’s previous performance was so amazing.

There are no examples of failed projects.

If Xu Yuan succeeded in developing an extreme ultraviolet lithography machine, it would have a huge impact on Ames. They would lose a lot of profits just from the orders for lithography machines.

Everyone knows that the current situation will not last forever.

When it was discovered that there was really no way to produce domestic extreme ultraviolet lithography machines, the only way left for the development of the semiconductor industry was negotiation and compromise.

When the supply of high-end chips is restored, wafer fabs will also increase their purchases of lithography machines.

But this is all based on the premise that extreme ultraviolet lithography machines have not been developed.

When Xu Yuan takes over and gets involved, things become like a variable and the result becomes uncontrollable.

Anything can happen.

He was worried for a few days, and gradually relaxed when he saw that there was no news related to Xu Yuan. But today, things were different, and he finally saw new news about Xu Yuan.

It’s just not about extreme ultraviolet lithography machines.

Participated in the research of quantum direct communication and broke the world record.

To achieve such results, in addition to relying on one's own talent, I believe that the time spent is also quite astonishing.

Under such circumstances, where would we have the energy to participate in the research of extreme ultraviolet lithography machines?

Yeah.

Xu Yuan is not good at lithography machines.

How can we be responsible?

It's just a name.

As his thoughts raced through his mind, Kajedi felt more and more that his analysis was correct.

The smile on his face grew brighter.

It was like a fishbone stuck in my throat that I finally swallowed. I felt relaxed all over and no longer had any worries.

As long as the genius Xu Yuan does not get involved in the research and development of the extreme ultraviolet lithography machine, he believes that even if he waits another ten years, Ames' extreme ultraviolet lithography machine will not be successfully replicated.

His thought stayed here, and he drank the tea in the cup.

Then continue browsing other news.

Just then, there was a knock on the door outside the office.

Kajedi uttered a single word without even raising his head.

"Please come in."

A girl with long brown hair and wearing a tight skirt pushed the door open, holding a document in her arms. She was obviously a secretary.

After she walked to the desk and stopped, she didn't say anything directly.

He first looked at Kajedi and greeted him.

"boss."

"You seem to be in a good mood today. Is there any good news?"

Hearing the voice, Kajedi temporarily withdrew his gaze from the screen, raised his eyes and said with a smile: "Indeed, I just saw some good news." His attitude was much softer than before.

The voice just fell.

The next second he thought of something important and immediately asked:
"Is there anything you need?"

"This is the latest factory expansion plan submitted. Please take a look, boss." When the female secretary heard what Kajedi said, she quickly took out the document and handed it to the boss with both hands.

The expansion of the lithography machine manufacturing plant has long been under discussion at the company and is part of the company's future plans.

After all, with the advent of 5G high-end chips, the global demand for lithography machines will increase further.

Ames' production capacity also needs to be improved simultaneously.

Originally, due to Xu Yuan's influence, he was worried that the other party could really develop an extreme ultraviolet lithography machine, which would have an impact on the company's orders, so he was a little hesitant to sign the expansion documents. Every time he read the plan, he would ask for revisions in some places.

The plan has not been formally signed.

Now that my worries have been completely eliminated, this plan comes at the right time.

So this time, Kajedi acted very decisively. He took the document, glanced at it, and then picked up the pen and signed his name.

"okay."

Such a quick movement made the female secretary stunned.

It was not until the document was handed back to him that he realized it belatedly and took it: "Then I'll be out first, boss." Then he turned and walked out of the office.

I just assumed that the boss was in a good mood today, so he didn't ask for any changes or go back to the first version.

……

Domestic netizens are still immersed in a state of loss and feel extremely bleak about the future of the domestic semiconductor industry.

I didn't know that Ames had already started the expansion of its lithography machine manufacturing plant.

As for Xu Yuan, who was highly expected by everyone, he returned to Yanjing.

At present, the quantum direct communication system has been successful after experiments. The next step is to increase the communication distance by launching new quantum satellites or quantum repeaters, and finally build a quantum network that can enable drones to transmit and receive commands.

As long as the signal transmission of the drone is achieved and a stable link is guaranteed within the mission scope, the quantum drone can be officially unveiled.

Of course, this requires joint research by multiple institutions.

In the short term, the conditions for conducting quantum drone experiments are not yet available.

After all, it will definitely be used on stealth unmanned bombers by then.

A strong alliance.

What's the point of studying quantum drones if we just do a small drone experiment?

The purpose is quite clear.

That is to enhance the combat capability of drones.

Since Xu Yuan did not need to participate in the whole process, he would definitely return to Yanjing after the experiment was successful. After all, the steady-state micro-beam lithography factory was a more urgent project.

……

Because the high-energy synchrotron radiation source device located in Yanjing Science City had already begun construction long before Zhao Xiang's team completed the verification of steady-state micro-beams. Although some functional structures were modified to be used as a light source in a lithography factory, the entire construction period was not delayed much.

After communicating with the construction team, initial delivery will be possible around October.

Allow project members to conduct experiments first.

As for the remaining infrastructure of the lithography factory, it will be carried out in parallel with the experiments to maximize time.

This is also thanks to the sufficient funds allocated by the Academy of Sciences. After all, for the construction party, the money is in place very quickly.

In the blink of an eye, more than two months have passed.

2017 10 Month 9 Day.

on Monday.

The eight-day holiday has just ended, but for the members of the lithography factory project in Yenching Science City, there are no signs of holiday aftereffects.

Some were just filled with anticipation and excitement.

Today is definitely a special day for them.

A delivery ceremony for the high-energy synchrotron radiation light source device will be held this morning.

This means that they can finally officially start the experiment.

Being able to enter this project and take a completely different path from overseas in the construction of a lithography factory, the researchers are definitely eager to complete it and let overseas countries see what it means to be ahead in chip manufacturing technology.

However, due to the delay in the construction of the high-energy synchrotron radiation light source device, they had to continue to deduce and analyze.

Think about the various problems that may arise in a lithography factory and find solutions whenever possible.

Unable to verify it in person.

Now the day has finally come for the high-energy synchrotron radiation light source device to be delivered. One can imagine how he feels when he thinks that he can start experiments right away.

It's not even an exaggeration.

If it is delivered before the holidays, no one will be willing to leave the lab during the holidays.

Dean Bai Xinzhou also attended today's delivery ceremony. After delivering his speech, the audience gave instructions to Xu Yuan and Zhao Xiang, their eyes full of expectations for them.

"It all depends on you from now on."

"We have no way out this time. We must solve the problem of high-end chip manufacturing no matter what."

Xu Yuan was undoubtedly confident about the lithography factory, and in response to the dean's earnest expectations, he immediately gave his guarantee.

"Don't worry, Dean."

"The problem of high-end chip manufacturing can definitely be solved. We need to build a photolithography factory so that overseas countries can see how a truly powerful country manufactures chips."

"We guarantee to complete the task." At this time, Zhao Xiang also took over the conversation and echoed.

Although Bai Xinzhou still felt that the lithography factory was too far-fetched and should be more difficult than an extreme ultraviolet lithography machine, he still had high hopes for it because of his trust in Xu Yuan and Mr. Yang.

"Okay."

“It’s good to have confidence.”

"Then I'll wait and see."

He smiled and responded to the two of them for a few words before ending the conversation and leaving. As the current president of the Academy of Sciences, Bai Xinzhou must have more things to deal with every day than just the photolithography factory, so he naturally couldn't stay here for a long time.

Xu Yuan was very clear about this and did not try to keep him.

Besides, the pressure will be on me next time, so I must focus my energy on the real things.

in the afternoon.

The delivery ceremony is over.

In the conference room of the Science City lithography factory, dozens of key R&D personnel gathered to attend their first meeting.

And most of the people present were professors.

Originally, the number of talents in the field of light sources in China is relatively limited.

In addition, the Institute of Optoelectronic Technology and other institutions conducting lithography machine research have already absorbed a part of the team, so it is not easy to find capable project members.

Even the personnel originally involved in the steady-state micro-bunching verification could no longer be gathered.

In this situation, Zhao Xiang was very worried at first.

I am afraid that it will affect the progress of the project.

After all, the photolithography factory is a project with a large amount of engineering, and the R&D cycle needs to be shortened as much as possible. It is not possible for the two of them to do it alone. It requires enough talents in related fields to participate and jointly promote the establishment of the photolithography factory.

But when everyone learned that they were going to follow Xu Yuan, they immediately showed great happiness.

Even many scientific researchers who remained overseas took the initiative to return to China to help, hoping to overcome this difficult situation.

It was precisely because of these reasons that the project members were quickly gathered.

Successfully passed the first level.

"I think everyone is very happy today because the high-energy synchrotron radiation light source device has been officially delivered. We have finally started the battle for the lithography factory."

"I believe that everyone sitting here agrees with steady-state microbunching."

“I firmly believe that a lithography factory can be realized.”

"And what I want to say is..."

"You have made the right choice. It won't be long before our lithography factory will shock the world."

At the podium in the conference room, Xu Yuan stood up and spoke encouraging words to everyone.

It quickly aroused everyone's emotions.

Everyone seemed to be able to see the scene of the lithography factory officially unveiled to the world.

If someone else said this, they might be considered empty talk, but no one thought so when it came to Xu Yuan. Because everyone knew that whatever Xu Yuan said would come true.

Next.

Xu Yuan felt that the atmosphere was about right, so he changed the subject and got down to business.

Arrange follow-up research work for everyone.

With the concept of steady-state micro-beaming, light sources of various wavelengths can be obtained, which can be used for the production of chips of different specifications. Even chips of several specifications can be produced at the same time. Compared with a single lithography machine, it can undoubtedly be called a lithography factory.

However, if we want to establish a stable output light source, we need to continue to experiment and solve the technical problems we face.

This is not something that can be done easily.

It depends on everyone's efforts.

Xu Yuan had already learned about the resume of each member and was very clear about their strengths.

Therefore, when assigning tasks, we basically try to do our best in our respective areas of expertise.

Although this was their first specific experiment, they had previously conducted joint research and discussions and had already gotten to know each other well, so they did not need to worry about anything.

It took just less than two hours to arrange everything and declare the meeting over.

Tomorrow we will officially enter the experimental stage.

It is worth mentioning that Zhao Xiang did not leave with everyone else. Instead, he looked at Xu Yuan, his lips moving slightly as if he was hesitating whether to say something.

Xu Yuan noticed this scene.

I didn't think too much about it and just blurted out, "What's the matter?"

Faced with Xu Yuan's questioning, Zhao Xiang finally made up his mind and then truthfully expressed his concerns.

"Originally, I shouldn't add more pressure at this time, but this is related to the manufacturing of domestic high-end chips, so I still want to make it clear first."

"You say." Xu Yuan nodded.

"Yes, in addition to the extreme ultraviolet lithography machine, Shin-Etsu currently refuses to provide us with high-end photoresist. In this case, we must also solve the high-end photoresist problem."

As Zhao Xiang finished speaking, Xu Yuan understood what the other party was worried about.

With the help of steady-state micro-beam lithography factory, although the lithography machine is bypassed, the photoresist used in chip manufacturing is still indispensable.

This is related to the quality of the chip.

Especially for the production of 7-nanometer or even 6-nanometer process chips, higher requirements are placed on photoresist.

At present, China only occupies a part of the market in the field of low-end and mid-range photoresists, while high-end photoresists are monopolized by Shin-Etsu of Neon Dongjing. And like the extreme ultraviolet lithography machine, it refuses to sell it to them.

under these circumstances.

Even if the photolithography factory is successfully built.

If only low- and mid-end photoresists are used to produce 7-nanometer chips, the yield rate will definitely be very low.

Greatly increase manufacturing costs.

So from this perspective, Zhao Xiang’s worries are not unreasonable.

In short, while building a photolithography factory, we must also find a way to deal with high-end photoresist.

When Shin-Etsu publicly talked about the photoresist issue before, Xu Yuan saw the news, so it was impossible for him to forget such a big thing.

Originally, he wanted everyone to focus on the construction of the lithography factory, so he did not mention this matter.

Since Zhao Xiang took the initiative to speak out today, we must make him feel at ease.

The thought stayed here, the corners of his mouth slightly raised, a smile appeared on his face, and he continued:

"Don't worry about the high-end photoresist problem, I'll take care of it. You forgot that researching materials is my area of ​​expertise."

That's right.

For high-end photoresist, he does plan to develop it himself.

With the progress bar on the panel, experimental materials can be said to be what he is best at. Compared with others, it can reduce a lot of trial and error costs. Based on the current domestic photoresist, it is not a problem to develop a photoresist suitable for 7-nanometer chips.

After hearing Xu Yuan's answer, Zhao Xiang subconsciously widened his eyes and his mind was unable to wrap around for a moment.

"You solve it..."

Just as I was about to question, I suddenly remembered that Xu Yuan was indeed very good at material research.

Whether it is high-performance carbon fiber composites or gallium nitride materials, the rapid achievement of technological breakthroughs is inseparable from Xu Yuan’s contribution.

So after I realized what was happening, I felt a little embarrassed.

"I had forgotten that you are better at studying materials than photolithography factories."

Xu Yuan smiled and said, "There shouldn't be any problem now, right?"

"No more." Zhao Xiang shook his head.

The two men ended their conversation here and then decided not to stay in the conference room to prepare for tomorrow's scientific research work.

……

……

Time is like a wild donkey, it never stops once it starts running.

For a project as large as a photolithography factory, the time consumption is undoubtedly huge. Under normal circumstances, it is normal to have no progress for several months.

Fortunately, we have a solid theoretical foundation and Xu Yuan has grasped the correct research direction.

Avoid taking the wrong path.

The construction progress of the entire factory is relatively rapid.

Especially in the most recent experiments, the data obtained have successfully reached the ideal standard.

It is this continuous positive feedback that further motivates scientific researchers and makes them more confident in the lithography factory.

In order to make the lithography factory debut in the world as soon as possible, everyone often took the initiative to work overtime. Some people even brought daily necessities and slept in the office at night.

As a result, this year's Spring Festival holiday is very short.

As the project leader, Xu Yuan had to set a good example, so he had to choose to spend the New Year in Yanjing.

And just after the New Year, when the lithography factory in Science City continued its intensive construction, the extreme ultraviolet lithography machine once again topped the hot search list online.

It has aroused heated discussions among a large number of netizens.

Just because the buffer period of more than a year has passed.

The document will officially come into effect from this month.

Although everyone knows that the situation cannot be changed in such a short time.

But I feel really depressed when I see that the Optoelectronic Technology Research Institute still hasn’t developed a 22-nanometer process lithography machine.

Even the comments in the comment section of related topics are filled with a sense of powerlessness.

It makes people see no hope.

"The document will officially take effect at the end of the month, but our extreme ultraviolet lithography machine is still nowhere to be found. Is there really no other solution?"

"In fact, I guessed it a long time ago. The buffer period is only a little over a year. What can we do?"

"We can achieve technological leadership in aviation and radar, but why can't we do so in lithography machines?"

"It would be nice if there were more talented scientists like Xu Shen."

"Now all we can do is believe."

"I'm afraid the higher-ups won't do that. If they just watch us continue to lag behind in the 5G field and fail to solve the problem of high-end chip manufacturing, they might really negotiate with overseas parties."

"I am still relatively optimistic. There is no reason why we cannot solve the problem of 7-nanometer chip manufacturing."

"It's been a long time since I last saw Academician Xu. Is he still researching quantum communications? Can he help with the research of domestic extreme ultraviolet lithography machines?"

……

However, in this situation, the first to break the defense was Northrop Military Industry.

They originally wanted to use this method to put pressure on the other party to join the international radar research project and share gallium nitride radar technology.

But they never expected that the Academy of Sciences would actually insist on waiting until the document came into effect.

This is totally different from what was expected.

You know, in their view, facing the huge pressure in the semiconductor industry, there is no way to solve it, and compromise is the best option. For this reason, they even slowed down the research on gallium nitride radar.

But now, more than a year has passed and there has been no progress in our gallium nitride radar.

And they are unable to obtain Chinese technology.

It feels like trying to steal a chicken but ending up losing the rice.

Faced with such a tough attitude, they had no choice but to continue researching gallium nitride radar on their own.

(End of this chapter)