Chapter 269: Inspiring Genius Idea [Subscribe]

"Steady-state micro-beam light sources can indeed be used for lithography, but we have only experimentally verified this concept. It will probably take a lot of experimental research to reach the specific application stage."

In the professor's office, after listening to Xu Yuan's words, Zhao Xiang was very tempted but had to state the facts.

As a concept he proposed and successfully verified, he certainly hopes that it can help the country solve its current difficulties.

After all, anyone who has access to the Internet will know what the current situation of the domestic semiconductor industry is like.

There is indeed an urgent need to solve the problem of high-end chip manufacturing.

The overseas Ames company uses a method of bombarding a gas of a specific composition with a high-energy electron beam to etch the wafer, but the current domestic technology is not yet able to do this. However, with the help of steady-state micro-beaming, the electron beam can be accelerated directly from zero speed.

Until it accelerates to a very high speed.

Then all electron beams of all speeds are available, and you just need to place the one you need at a specific position.

Originally, synchrotron radiation was a relatively annoying thing in the accelerator field.

Because it will waste the energy of the accelerator and hinder the further acceleration of the particles.

But if used in photolithography, this effect can be used to produce light of a specific wavelength.

It can be said that it is really mind-opening.

If this lithography factory can really be built, its efficiency will be far beyond that of ordinary lithography machines.

It is no exaggeration to say that chips of different specifications can be manufactured at the same time.

It's like if someone wants water at 60 degrees, but can't boil it accurately, then just put a very long pipe.

Let water at 100 degrees flow through the pipe to cool it down gradually. Just connect water of that degree at the corresponding position.

However, ideas are just ideas. How to turn these ideas into reality still requires in-depth research.

And lots of experiments.

How could Xu Yuan not know Zhao Xiang’s worries? After all, the research on steady-state microbunching is indeed immature.

If we start the lithography factory project a few years later, we may be more confident and not be as timid as we are now.

But sometimes plans can't keep up with changes.

Situation waits for no one.

At present, the country’s research on 5G is basically at a standstill due to problems with high-end chips.

Since we have decided to solve the problem of high-end chip manufacturing technology on our own, the speed must be as fast as possible.

Otherwise, the development of 5G will lag behind the international level.

Even if we catch up at that time, we will still face various problems.

As the saying goes, those who fall behind will be beaten. I can say that I have a deep understanding of this.

Therefore, we certainly cannot place all our hopes for solving the current predicament on domestically produced extreme ultraviolet lithography machines.

Knowing that there is a new direction or path, you should try your best regardless of whether it will succeed in the end.

With this thought in mind, Xu Yuan felt much more relaxed.

He was not polite to Zhao Xiang at all.

He pulled a chair and sat opposite the desk, poured himself a glass of water, then looked at Zhao Xiang and continued speaking.

"Many patents for traditional EUV lithography technology have been mastered by Ames. It is indeed a huge challenge for us to develop domestic EUV lithography machines."

"But who stipulated that extreme ultraviolet lithography must be used to manufacture high-end chips?"

“Building a lithography factory using a steady-state micro-beam light source is more in line with our semiconductor market situation.”

"Once this path is established, chip manufacturing will largely become an infrastructure project, which is the exclusive track that we are most familiar with and good at."

Zhao Xiang listened carefully to what Xu Yuan said, and his face turned red with excitement.

As a scientific researcher, he has been paying attention to what is happening online these days.

When I first saw the overseas restrictions on the domestic 5G field, I subconsciously thought of my own steady-state micro-bunching.

However, as soon as this thought came into his mind, he quickly put it behind him.

Because in his opinion, steady-state microbunching still requires more experiments and is not yet at the stage where it can be used for specific lithography manufacturing chips.

After all, there are no suitable experimental conditions in China.

You should know that even the previous verification was conducted using the storage ring in Berlin.

Today, the latest generation of high-energy radiation synchrotron light source located in Yanjing is under construction in full swing, but before it is officially put into use, further research and experiments on steady-state microbeams cannot be carried out.

So he did not propose the plan to build a lithography factory to the Academy of Sciences.

Unexpectedly, Xu Yuan took the initiative to propose it, and it was preliminarily approved by the Academy of Sciences.

At present, overseas markets are collectively pessimistic about domestically produced extreme ultraviolet lithography machines, and they all believe that this project is impossible to achieve.

Among them, Ames CEO Kajedi publicly stated in an interview with the media that even if the drawings of the extreme ultraviolet lithography machine were made public, it would be impossible to manufacture a domestic extreme ultraviolet lithography machine.

As the saying goes, even a clay figure can get angry, let alone these scientific researchers.

I felt so angry after seeing the news.

We want to vindicate domestic scientific researchers and let overseas countries see that we can also achieve leadership in the semiconductor field.

From this perspective alone, building a photolithography factory is undoubtedly the most appropriate option.

It is easy to imagine that when Ames was still proud of his company's extreme ultraviolet lithography machine, a lithography factory had already been built in China, which could even directly affect their orders. It is easy to imagine how exciting the faces of the entire overseas world would be at that time.

It was precisely because of these thoughts that Zhao Xiang became more and more interested.

Soon he couldn't help but ask another question.

"I understand what you said. I want to see the establishment of a photolithography factory more than anyone else."

"However, there is still a lack of experiments on steady-state micro-beams, and even if we really want to build a lithography factory, we must first solve the problem of steady-state micro-beam light sources."

How could Xu Yuan not know what Zhao Xiang was really thinking? After listening to everything the other party said, the corners of his mouth suddenly lifted up slightly and a smile appeared on his face.

The next second, he didn't keep anyone in suspense and answered directly:
"Direct EUV lithography experiments on steady-state microbeam sources can also study the characteristics of steady-state microbeams."

"As for the synchrotron light source needed for the lithography factory, my idea is to modify the high-energy synchrotron radiation light source device that is currently being built to increase its ability to perform lithography."

The Yenching High-Energy Synchrotron Radiation Light Source Facility is a major project previously identified and implemented by the Academy of Sciences.

It belongs to the country's basic science construction.

It was precisely because Zhao Xiang's team successfully verified the concept of steady-state microbunching with the help of the Berlin Storage Ring and successfully proved the value of steady-state microbunching, and because Mr. Yang was very supportive of the construction of a high-energy synchrotron radiation source, that the project went so smoothly.

However, the lithography factory was not considered at the beginning, after all, this concept was still in the experimental stage.

Therefore, the high-energy synchrotron radiation light source device built is mainly used for related scientific experiments.

However, if it is properly modified now to add the function of being able to be used for EUV lithography, it can become an important scientific facility for basic scientific experiments and coexist with lithography factories.

He thought this way because time was tight and there was not much time to build a synchrotron radiation source.

Otherwise, if we choose a suitable location to build it again, it will take longer and the funding issue will also need to be considered. It is far better to transform it based on the high-energy synchrotron radiation light source device.

In this way, even if the lithography factory research is unsuccessful, it can still continue to be used as a basic scientific facility.

It will not cause much loss to the Academy of Sciences.

It can be seen that Zhao Xiang also supports this idea. He immediately nodded in agreement when he heard it.

“It’s really a good choice.”

“And the reconstruction won’t add much trouble, and maybe we can deliver it ahead of schedule.”

After he finished speaking, he fell silent again, and this time he seemed to be weighing his decision in his mind.

finally.

Zhao Xiang finally seemed to have made up his mind.

He looked at Xu Yuan with a determined gaze and said in a decisive tone:

"I agree with your proposal."

The voice just fell.

The next second he calmed down again, but the smile on his face showed no sign of disappearing.

"To be honest, it's only with you, Academician Xu, that we can build a photolithography plant. If someone else were in charge of this project, I really wouldn't have the confidence to build one."

He was absolutely right.

At the beginning, under the introduction of Mr. Yang, he had the honor to work with Xu Yuan to study and verify steady-state microbunching.

If Xu Yuan hadn't helped a lot, steady-state microbunching would not have entered the verification stage so quickly.

This is equivalent to accelerating the research on steady-state microbunching.

Although steady-state microbunching is not yet mature, he still wants to try it in cooperation with Xu Yuan.

Perhaps it is really possible to build the first domestic lithography factory and give a sensation to people all over the world.

If someone else talked to him about this, they would definitely not choose to say it this way.

Xu Yuan knew Zhao Xiang very well and knew that he would definitely agree, so after hearing this answer, there was no surprise on his face.

After reacting immediately, he took the initiative to extend his hand and shake hands with the other party.

"I'm sure it's OK."

When saying this to the other person, I feel very confident.

Because at this moment, he suddenly noticed the light curtain panel appearing in his field of vision, and the progress bar of the new project had already increased.

-

Mission: Steady-state microbeam lithography factory
Subject: Physics

Progress: 20%
Result: Not completed
Obviously, the 20 percent progress bar that appeared was the result of their previous research on steady-state micro-bunching.

Perhaps the progress bar will grow more slowly in the future, but he believes that the result will definitely not disappoint everyone.

Now that we have successfully invited Zhao Xiang to join the key project of the steady-state micro-beam lithography factory, the first thing to do is to complete the detailed project plan.

And discuss the research at the Academy of Sciences meeting.

Only after the project is formally approved can implementation begin.

And transform the high-energy synchrotron radiation light source device.

Xu Yuan and Zhao Xiang were responsible for the research on steady-state micro-bunching, so it was natural for them to come up with relevant plans.

So for the next half month, the two of them basically worked together to perfect the plan.

It is also worth mentioning that during the period, the two of them also went to Mr. Yang’s office in the Science Museum.

Ask for advice and discuss with them.

Although Mr. Yang did not recommend that the country build a particle collider, he was very supportive of accelerator light sources.

It was he who gave Zhao Xiang a lot of help before, which strengthened Zhao Xiang's confidence in the verification of steady-state microbunching.

no doubt.

When Mr. Yang learned that further research on steady-state micro-bunching could provide a different approach to building a lithography factory, he could completely solve the problem of the difficulty in manufacturing high-end chips in China.

Not only was he very happy about this, he also expressed his full support.

I also firmly believe that China can forge its own path in chip manufacturing.

Successfully built a photolithography factory.

...June 2017, 1.

Friday.

There is still one week left until New Year's Eve.

This morning, the Academy of Sciences was filled with a serious atmosphere, and even the assistant researchers in the academy had no smiles on their faces.

Just an extremely serious look.

Only half a month had passed since the last emergency meeting of the Academy of Sciences.

So they held a meeting again.

And the number of participants will far exceed that of last time.

This can be said to be a special situation that has never been seen before.

This is enough to prove how urgent the current situation is.

At times like this, tension and seriousness are the main themes, and no one can still smile and feel relaxed.

"Brother Zhao, relax a little."

"no problem."

At this moment, on the road inside the Academy of Sciences, Xu Yuan patted Zhao Xiang on the shoulder and they rushed towards the hall together.

Because the two of them were quite familiar with each other, Xu Yuan always called him Brother Zhao in private.

Today, their main task in attending this meeting is to report on the steady-state micro-beam lithography factory plan, which determines whether this subsequent project can be carried out smoothly and normally.

Unlike the last emergency meeting, this time the meeting was notified in advance.

Therefore, the number of people attending the meeting on site is conservatively estimated to be over a hundred.

They are all academicians and senior professors in semiconductor-related fields.

Although Zhao Xiang is also a full professor, his status is far inferior to Xu Yuan's status as an academician of the two academies.

In addition, facing so many academicians and professors giving reports, Zhao Xiang couldn't help feeling a little nervous.

"I hope everything goes well later."

When Zhao Xiang heard Xu Yuan's comfort, he paused for a moment, took a deep breath and said these words, then continued walking.

Since we have decided to participate in Xu Yuan's project, we will do our best to build the lithography factory.

Then he certainly hopes to succeed.

If the proposal is presented at the scene, it will be directly rejected and cannot be passed.

It will definitely be hard to accept in your heart.

I feel like I have let Xu Yuan down.

Therefore, it is normal to feel stressed.

Xu Yuan is very familiar with the hall. He attended the certificate awarding ceremony for the newly elected academicians in it for the first time, and later attended the meetings in the academy. Today he will go on stage to report again.

It must be a familiar route.

There is absolutely nothing to worry about.

However, he also expressed his understanding of Zhao Xiang's current mood, so he added another sentence.

"Don't worry, Mr. Yang will also attend the meeting in the morning."

Yes.

Due to the matter of the steady-state micro-beam lithography factory, Mr. Yang also took the initiative to attend today's meeting, which was rare.

With his trust and support for steady-state microbunching, there would definitely be no problem with the plan.

He is very confident about this.

Just like that, not long after, the two of them successfully arrived at the hall.

Pushing open the door and walking inside, he could see that quite a few people had already arrived, among whom Xu Yuan also saw quite a few familiar faces.

Among them is Academician Luo Yajie from the Institute of Optoelectronic Technology.

Their Institute of Optoelectronic Technology will also carry out research and development of domestic extreme ultraviolet lithography machines. According to relevant regulations and procedures, they will also be on stage today to make a plan report.

Simply put, it is to come up with the direction of the next research and what stage it is currently in.

After the clarification, the hospital will at least know the progress and provide support in terms of personnel, funding, equipment and other issues.

Xu Yuan was not idle either. Before the meeting started, he took Zhao Xiang to greet Luo Yajie and others.

It also allows Zhao Xiang to relax.

It was clear that compared to the last time I saw Luo Yajie, his face looked even more haggard today. It was obvious that he had been worrying about the EUV lithography machine for the past half month.

But there is no way around it. Now that overseas countries have already laid out their tactics, how can we not respond actively?

I still feel proud of being a scientific researcher.

Just as the two were exchanging pleasantries, the door was pushed open from the outside again.

The people who walked in were Mr. Yang, Dean Bai Xinzhou, and several other responsible personnel.

"Hello, Mr. Yang."

Other people in the hall were surprised to see that Mr. Yang had also come, and they quickly stood up and greeted him.

Everyone had smiles on their faces.

After all, not to mention that Mr. Yang is the oldest in the field, his achievements in the scientific community alone are worthy of respect from others.

……

After Bai Xinzhou and Mr. Yang entered the venue, no further time was wasted.

The meeting was immediately announced to officially begin.

According to the process, Bai Xinzhou briefly spoke a few words and then went straight into the project plan report process.

Mr. Yang did not make any speech on this, and it was obvious that he came here specifically for the steady-state micro-beam lithography factory.

Finally, Luo Yajie from the Institute of Optoelectronic Technology took the lead to give a report.

Although Luo Yajie shared a good news with everyone, when he talked about their institute's 22-nanometer super-resolution lithography equipment, which had recently achieved a new technological breakthrough, it immediately caused warm applause from many people in the audience.

But at the same time, everyone knows that even if the 22-nanometer lithography machine manufacturing technology is mastered, there is still a huge gap from Ames' 7-nanometer extreme ultraviolet lithography machine.

The key gap is that it makes it impossible to see the hope of catching up or even surpassing.

Afterwards, two other research institutes conducting lithography machine research also came on stage to give research reports.

As for the results, they are similar to those of the Institute of Optoelectronic Technology.

Even if we continue our research, unless a miracle happens, it will be impossible to catch up with Shanghai within a few years.

Time passes minute by minute.

Dean Bai Xinzhou's face also turned ugly.

If we were full of confidence and high morale when we first announced that we would independently develop our own extreme ultraviolet lithography machine, now, after half a month of settling down and gaining knowledge, we truly feel the powerlessness we face due to the huge technological gap.

But soon Bai Xinzhou suddenly thought of something, and while the others went downstairs, he immediately locked his eyes on Xu Yuan.

The next second he got straight to the point:

"Academician Xu."

“I remember you mentioned last time that the steady-state microbeam source can be used for EUV lithography.”

“Do you have a specific plan now?”

When Xu Yuan heard his name, he naturally didn't keep the question secret and answered immediately.

"Yes Dean."

"During this period, Professor Zhao Xiang and I, who verified the steady-state micro-beaming, successfully completed the conception of the lithography factory. I applied to the institute to start this project as soon as possible."

After saying that, he and Zhao Xiang worked together to explain the completed plan.

Some of the people present had heard of steady-state microbunching, while others were hearing about it for the first time.

Seeing that Xu Yuan, an academician of the two academies, attached so much importance to the project and even asked for it to be approved and implemented as soon as possible, my curiosity was successfully aroused.

They all focused their attention and looked at Xu Yuan.

When the conceptual diagram of the steady-state micro-beam lithography factory was fully displayed on the screen in the hall, everyone's attention was instantly attracted.

"Most of the patents for traditional extreme ultraviolet lithography technology are in the hands of AMS. It is almost impossible for us to develop it in the short term under such circumstances."

"So I wonder if there is another way to achieve the manufacturing of high-end chips."

"Eventually steady-state microbunching came to my mind."

"Theoretically, through the steady-state micro-beam light source, we can directly build a photolithography factory and use light sources of different wavelengths to produce chips of different specifications."

“And I believe that China will be the largest semiconductor market in the future.”

"The photolithography factory also suits our national conditions."

……

Xu Yuan noticed everyone's expressions, but did not explain anything at this time.

Instead, he reports on the lithography factory plan at his own pace.

The relevant theoretical technologies involved later were successfully completed with the cooperation of Zhao Xiang.

After the entire plan was reported, the entire hall fell into a brief silence, and then there was a commotion in the audience.

Everyone was discussing this plan.

"It is absolutely a genius idea to turn the chip manufacturing problem into infrastructure, which is what we are best at."

"We really don't have to follow the path taken overseas. Who says that you must have a lithography machine to produce chips? Building such a lithography factory is suitable for us."

"This is a completely new research direction and should be tried."

"If photolithography factories can really be realized, it will be a revolution for the global semiconductor industry."

"I can't wait to see this lithography factory in operation. Even if we have the blueprints, we can't manufacture an extreme ultraviolet lithography machine with 100,000 parts, but we can build a lithography factory that can handle many lithography machines."

“Perhaps the steady-state micro-beam lithography factory is the biggest turning point for us to solve our predicament.”

……

Bai Xinzhou, who had been stern for a long time, finally smiled at this moment. He was also optimistic about the lithography factory plan proposed by Xu Yuan and Zhao Xiang.

What's more, any project that Xu Yuan was responsible for has never failed.

However, he did not raise his hand to make a decision immediately. Instead, he turned his head to ask Mr. Yang beside him for his opinion.

"Mr. Yang."

“What do you think about the steady-state microbeam lithography factory?”

Mr. Yang had come here for this matter in the first place, and now that it was finally his turn, he naturally said whatever he wanted to say.

"Xiao Xu and Zhao Xiang showed me this plan a long time ago. Although there are still some technical problems to be solved, I think it is still very feasible."

……

(End of this chapter)